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Category:Natural history museums in Wisconsin
Category:Living museums in Wisconsin
Category:Museums established in 1995
Category:1995 establishments in Wisconsin1. Field of the Invention
The present invention relates to an acceleration sensor that detects acceleration with high sensitivity and accuracy, and to a method for producing an acceleration sensor.
2. Description of the Related Art
An acceleration sensor is designed to detect acceleration, and it is well known to use a thin plate or plate-like member as an acceleration sensor. In recent years, there has been an increase in demand for smaller and thinner acceleration sensors in accordance with an increase in the use of lightweight electronic equipment. There is a limit to the magnitude of acceleration that can be detected and it is also important to accurately detect acceleration.
In order to make an acceleration sensor thinner, it is desirable to reduce the distance between two or more detecting elements that are arranged close to each other to detect acceleration. If the distance is small, however, the detecting elements may be affected by thermal noise. To solve this problem, Japanese Patent Application Laid-Open No. 2004-219066 proposes a technique in which a detecting element and a fixed electrode are electrically connected with each other via a piezoelectric element in order to detect acceleration.
Here, a piezoelectric element is formed of lead zirconate titanate (PZT) or another piezoelectric material which is a ferroelectric substance. A substance in which the piezoelectric element is embedded is produced by dissolving PZT in an organic solvent to form a paste, curing it, and sintering it after being punched out from the paste. The piez
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