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For a tungsten layer deposited by a chemical vapor deposition (CVD) process, the tungsten layer is formed on a substrate by a chemical vapor deposition process. A substrate with a tungsten layer thereon is cleaned first before the CVD process. For example, a substrate is cleaned by reactive ion etching (RIE) with oxygen (O2) gas as a reactive gas. Thereafter, the substrate is heated to form a tungsten layer on the substrate. Since some surface tension is generated when the O2 gas comes in contact with the surface of the substrate, the substrate is then cleaned by a treatment with a cleaning solution.
It is also known in the art to deposit a polysilicon layer on a substrate by a chemical vapor deposition process, as shown in FIGS. 1A and 1B. Referring to FIGS. 1A and 1B, a substrate 100 with a polysilicon layer thereon is cleaned by an RIE process with oxygen (O2) gas. Then the substrate 100 is heated to form the polysilicon layer on the substrate 100. Thereafter, an isolating layer 103 for isolating elements is formed on the polysilicon layer by a photolithographic process. However, when the substrate 100 is cleaned with O2, reactive gas may still remain in the substrate 100, as shown by the

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